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- We partner with OEM process tool manufacturers to provide full turn-key, and custom, automation handling solutions.
- We customize the automated solutions to meet end customer specifications, and allow them to be integrated into end users production environments.
- We have extensive experience with different wafer types, different OEM process tools, and different factory integration requirements.
- CHAD can supply standard wafer handling solutions to meet your non-standard wafer handling requirements.
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Capabilities
- Wafer Handlers for 50mm to 450mm Wafers
- Wafer Thickness Down to 75µ
- Experienced in Handling Non-Standard Wafers, Including: Film Frame, Glass, Perforated, Reticle, Substrate, Thin, Trenched and Warped
- Support for All Packaging Types, Including FOUP-POD, SMIF-POD, Open Cassette, Coin Stack and Film Frame
- Cleanliness Levels Down to ISO Class-2
- CE, S2, and S8 Compliant
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WaferMate200 |
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- Formed sheet metal construction
- Low cost
- Small footprint
- For 50mm To 200mm Wafers In Open Cassettes
- Cleanliness Levels Down To ISO Class-4
- CE, S2, And S8 Compliant
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WaferMate300 |
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- Formed sheet metal construction
- Low cost
- Single FOUP width, or multiple FOUP width
- Small footprint (22” wide)
- For 200mm to 450mm wafers in BOLTS compliant packaging:
- Cleanliness Levels Down to ISO Class-2
- CE, S2, and S8 Compliant
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Non-Standard Wafers
We can handle any kind of wafer:
- Thin (< 75um thick)
- Warped (up to 10mm)
- Trenched
- Glass
- Substrate
- Reticle
- Film Frame
- Perforated
- Bumped
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Line Configurations
Different configurations include:
- Supporting One Tool
- Supporting Two Tools (Either Sequentially Of Independently)
- Supporting Three Tools
- Supporting Inline Process Equipment (Loading And Unloading)
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